We have also found the misalignment limit by measuring the e-beam current that came out from the microcolumn. This new method can replace the conventional alignment method where the expensive equipment like the aligner or the STM is required. 1 Gaussian irradiance profiles are symmetric around the center of the beam and decrease as the distance from the center of the beam perpendicular to the direction of propagation increases (Figure 1). Fabricating, aligning, and mounting mirrors to achieve diffraction-limited imaging at sub-nanometer wavelengths is a considerable challenge. We have also made precise alignment of the electron lenses by illuminating the laser beam through the roughly aligned electron lenses and adjusting the electron lenses while monitoring the diffraction pattern formed by the diffracted laser light from the lens apertures. The M 2 factor, also known as the beam quality factor, compares the performance of a real laser beam with that of a diffraction-limited Gaussian beam. The observed diffraction pattern by naked eyes was the circular Airy disk and the measured eccentricity of the lens aperture was found to be less than 0.02. In this work, we have fabricated the quality electron lenses using the semiconductor processing technologies and checked their circular shapes by using the laser diffraction pattern. Color combines RGB and LRGB image sets, using a single alignment reference image. The quality of electron lenses and precision of their alignment are very important factors that determine the resolution of the microcolumn. We have pioneered the development of ultra high accuracy optical testing and alignment methods, working at extreme ultraviolet wavelengths, and pushing. If an image is made through a small aperture, there is a point at which the resolution of the image is limited by the aperture diffraction.As a matter of general practice in photographic optics, the use of a smaller aperture (larger f-number) will give greater depth of field and a generally sharper image. Neat and actively controlled alignment is nevertheless mandatory when instruments yield diffraction-limited images to reach a high, stable wavefront quality. Align images using a variety of automatic and manual alignment technqiues.
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